Engineers develop world’s first deep-UV microLED display chips for maskless photolithography

Dec 31, 2024 (Nanowerk News) In a breakthrough set to revolutionize the semiconductor industry, the School of Engineering of the Hong Kong University of Science and Technology (HKUST) has developed the world’s first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines. This enhanced efficiency UVC microLED has showcased the viability...