Ultra-low-profile z-tip-tilt nanopositioning stage provides frictionless motion


Sep 11, 2024

(Nanowerk News) PI, a global leader in motion control and nanopositioning systems, offers an ultra-low-profile Z-Tip-Tilt stage designed for demanding alignment applications in optics, semiconductors, precision assembly, and photonics. Based on air bearings and linear motors, the stage is wear-free, maintenance-free, and cleanroom compatible. Z-Tip-Tilt Nanopositioning Stage boasts 250mm Diameter, 60mm Height , A-523 Z-Tip-Tilt Nanopositioning Stage boasts 250mm Diameter, 60mm Height , A-523. (Image: PI)

High Speed, Resolution, and Load Capacity

High speed is ensured by 3-phase linear motors, while high resolution and precision are provided by closed-loop operation with linear encoders (1 nm resolution) for direct position feedback. The direct-drive design, free of drive screws and gears, enables high dynamics with acceleration up to 1g, high speed, and outstanding positional repeatability with zero backlash. The 10-inch diameter platform supports a high load capacity of 18 lbs. The compact design provides 5 mm of Z-travel and a rotation range of 2° for tilt axes.

Low Profile Enabled by Parallel-Kinematics Design

The parallel-kinematics, integrated design with only one moving platform significantly reduces height, center of gravity, and inertia — ideal for high-dynamic applications. The single-platform design also eliminates the accumulation of errors commonly seen in Z-Tip-Tilt systems based on three individual modules.

5-Axis and 6-Axis Combinations

The A-523 Z-Tip-Tilt stage can be paired with a 2-axis planar air-bearing stage to provide 5-axis precision motion for semiconductor and laser processing automation. A 6DOF combination with the low-profile A-361 XYθz stage is also available.

Example of a 5-Axis high-precision stage based on the A-523 Z-Tip-Tilt and the A-311 planar XY stage More information on the Z-Tip-Tilt nanopositioning stage: A-523 PIglide High-Precision Z-Tip-Tilt Stage with Air Bearings.

Applications

The A-523 three-axis air-bearing stage is ideal for high-precision alignment automation tasks, such as optics testing and positioning, wafer inspection, fiber positioning, flat-screen inspection, lens alignment, maskless lithography, and µ-LED manufacturing.

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